Effects of kinematic variables on nonuniformity in chemical mechanical planarization-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Effects of kinematic variables on nonuniformity in chemical mechanical planarization

Published:2000-09 Issue:11 Volume:40 Page:1651-1669
ISSN:0890-6955
Container-title:International Journal of Machine Tools and Manufacture
language:en
Short-container-title:International Journal of Machine Tools and Manufacture

Author:

Hocheng H.,Tsai H.Y.,Tsai M.S.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference7 articles.

1. The theory and design of plate glass polishing;Preston;Journal of the Society of Glass Technology,1927

2. The analytical aspect of the Preston equation in chemical mechanical planarization;Hocheng,1998

3. Application of chemical mechanical polishing to the fabrication of VLSI circuit interconnections;Patrick;Journal of the Electrochemical Society,1991

4. Annular lapping of precision optical flatware;Cooke;Optical Engineering,1976

5. A kinematic analysis of CMP based on velocity model;Hocheng,1997

Cited by 73 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research on composite pattern design and lapping performance of fixed abrasive pads controlled by multi-physical fields;Precision Engineering;2024-12

2. Review—Principles and Applications of Electrochemical Polishing;Journal of The Electrochemical Society;2024-09-02

3. Experimental Strategies for Studying Tribo-Electrochemical Aspects of Chemical–Mechanical Planarization;Lubricants;2024-02-19

4. Comparison of Different Optical Measurement Methods in the Evaluation of the Wear of Sls-Fabricated Tool Used for Free Abrasive Machining;2024

5. Wireless photoelectrochemical mechanical polishing for inert compound semiconductor wafers;Journal of Manufacturing Processes;2023-02

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3