Lightly-doped polysilicon bridge as a flow meter-Reference-Cited by-同舟云学术

Lightly-doped polysilicon bridge as a flow meter

Published:1988-09 Issue:1 Volume:15 Page:63-75
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Tai Yu-Chong,Muller Richard S.

Publisher

Elsevier BV

Subject

General Engineering

Reference16 articles.

1. Polysilicon bridges for anemometer application;Tai;Digest Tech. Papers, 3rd Int. Conf. on Solid-State Sensors and Actuators (Transducers '85) Philadelphia PA,471985

2. Conduction properties of lightly doped polycrystalline silicon;Korsh;Solid-State Electron,1978

3. The electrical properties of polycrystalline silicon;Seto;J. Appl. Phys.,1971

4. Phosphorous doping of low pressure chemically vapor-deposited silicon films;Mandurah;J. Electrochem. Soc.,1979

5. Hall mobility in chemically deposited polycrystalline silicon;Kamins;J. Appl. Phys.,1971

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