Micromachined Flow Sensors in Biomedical Applications
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/3/2/225/pdf
Reference84 articles.
1. Introduction to the differential producer;Miller,1996
2. MEMS-based gas flow sensors
3. Integrated silicon anemometer
4. Micromachined flow sensors—a review
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