Surface reactions and structural evolution of organosilicate glass under Ar plasma bombardment
Author:
Publisher
Elsevier BV
Subject
Computational Mathematics,General Physics and Astronomy,Mechanics of Materials,General Materials Science,General Chemistry,General Computer Science
Reference32 articles.
1. Molecular modeling of low-k films of carbon-doped silicon oxides for theoretical investigations of the mechanical and dielectric properties
2. Effects of He and Ar ion kinetic energies in protection of organosilicate glass from O2 plasma damage
3. Mechanistic study of plasma damage of low k dielectric surfaces
4. The effect of VUV radiation from Ar/O2plasmas on low-kSiOCH films
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