Advanced Under-Bump-Metal Scaling Solder Micro-Bump Interconnect Down to 10μm Pitch
Author:
Affiliation:
1. Ishihara Chemical Corporation,Research and Development Department,Kobe,Hyogo,Japan
2. Assembly & Test Technology Development, Intel Corporation,Chandler,AZ,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9795348/9795361/09795439.pdf?arnumber=9795439
Reference2 articles.
1. Scaling Solder Micro-Bump Interconnect Down to 10?m Pitch for Advanced 3D IC Packages;li;IEEE 71st Electronic Components and Technology Conference,2021
2. Effect of intermetallic formation on electromigration reliability of TSV-microbump joints in 3D interconnect
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4. Diffusion barrier property of Co-W layer compared with Ni layer in fine pitch micro-bumps during high temperature storage;Materials Letters;2023-09
5. 微細バンプ接合による積層チップ間接続技術;Journal of The Japan Institute of Electronics Packaging;2023-05-01
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