Nano-Through Silicon Vias (nTSV) for Backside Power Delivery Networks (BSPDN)
Author:
Affiliation:
1. Geert van der Plas imec,Leuven,Belgium
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10185199/10185158/10185227.pdf?arnumber=10185227
Reference11 articles.
1. Power from Below: Buried Interconnects Will Help Save Moore's Law
2. Buried Power Rail Integration With FinFETs for Ultimate CMOS Scaling
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