Nanoscale Three-Dimensional Patterning of Molecular Resists by Scanning Probes-Reference-Cited by-同舟云学术

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Nanoscale Three-Dimensional Patterning of Molecular Resists by Scanning Probes

Published:2010-04-22 Issue:5979 Volume:328 Page:732-735
ISSN:0036-8075
Container-title:Science
language:en
Short-container-title:Science

Author:

Pires D.,Hedrick J. L.,De Silva A.,Frommer J.,Gotsmann B.,Wolf H.,Despont M.,Duerig U.,Knoll A. W.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference25 articles.

1. Unconventional Methods for Fabricating and Patterning Nanostructures

2. Nano-chemistry and scanning probe nanolithographies

3. Nanofabrication by scanning probe microscope lithography: A review

4. Nanolithography and Nanochemistry: Probe-Related Patterning Techniques and Chemical Modification for Nanometer-Sized Devices

5. Proximity effect in electron‐beam lithography

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