Study of catalytic properties and grinding performance of single-crystal SiC heterogeneous Fenton reaction grinding discs

Abstract

Abstract This study proposes an ultra-precision processing method based on the heterogeneous Fenton reaction of grinding discs to improve the grinding efficiency of single-crystal SiC via a chemical reaction. Ceramic-bonded grinding discs with heterogeneous Fenton reaction were prepared, and the influence of the chemical reaction parameters on the catalytic properties of the discs as well as the grinding effect of single-crystal SiC under different grinding parameters were investigated and the grinding mechanism was analysed. The results indicate that the higher the mass fraction of H2O2, the stronger the catalytic properties. The maximum material removal rate (MRR) (43.13 nm/min) and the lowest surface roughness (Ra 1.06 nm) were obtained at 20 wt.%. Moreover, the lower the pH value, the stronger the catalytic properties of the grinding solution and the larger the MRR; however, the best grinding surface quality was obtained at pH = 3. The MRR increased with the grinding pressure, and the surface quality was superior at a pressure of 62.4 kPa. The MRR also increased with increasing disc speed, yielding a low surface roughness at a speed of 200 rpm. The mechanical and chemical effects are balanced to improve the surface quality of SiC. The Fenton reaction grinding disc oxidises the SiC surface to form an oxide layer of SiO2; subsequently, the mechanical action of the abrasive removes the oxide layer, exposing a new SiC surface where oxidation and material removal continue to occur. This cyclical process enables the efficient grinding of single-crystal SiC.