Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection-Reference-Cited by-同舟云学术

Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection

Published:2023 Issue:0 Volume:16 Page:2-11
ISSN:1882-6687
Container-title:IPSJ Transactions on System and LSI Design Methodology
language:en
Short-container-title:IPSJ Transactions on System LSI Design Methodology

Author:

Kataoka Gaku¹,Yamamoto Masahiro¹,Inagi Masato¹,Nagayama Shinobu¹,Wakabayashi Shin'ichi¹

Affiliation:

1. Hiroshima City University

Publisher

Information Processing Society of Japan

Subject

Electrical and Electronic Engineering,Computer Science Applications

Link

https://www.jstage.jst.go.jp/article/ipsjtsldm/16/0/16_2/_pdf

Reference22 articles.

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2. [2] Tamagawa, S., Inagi, M., Nagayama, S. and Wakabayashi, S.: Table reference based acceleration of a lithography hotspot detection method based on approximate string search, Proc. IARIA CENICS 2017, pp.8-14 (2017).

3. [3] Wuu, J.-Y., Pikus, F.G., Torres, A. and Marek-Sadowska, M.: Rapid layout pattern classification, Proc. ASP-DAC 2011, pp.781-786 (2011).

4. [4] Matsunawa, T., Gao, J.-R., Yu, B. and Pan, D.Z.: A new lithography hotspot detection framework based on adaboost classifier and simplified feature extraction, Proc. SPIE, Vol.9427, pp.1-11 (2015).

5. [5] Yu, Y.-T., Lin, G.-H., Jiang, I.-R. and Chiang, C.: Machine-learning-based hotspot detection using topological classification and critical feature extraction, IEEE Trans. CAD, Vol.34, pp.460-470 (2015).

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