Manufacturing process for piezoelectric strain sensor sheet involving transfer printing methods

Author:

Yamashita Takahiro,Okada Hironao,Itoh Toshihiro,Kobayashi Takeshi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Microtransfer printing techniques for optical applications;Transfer Printing Technologies and Applications;2024

2. Preparation of Pb(Mg1/3Nb2/3)TiO3–PbTiO3 thick films with highly preferred orientation via screen printing;Japanese Journal of Applied Physics;2023-07-21

3. Development of a nail-deformation haptics device fabricated adopting ultra-thin PZT-MEMS technology;Japanese Journal of Applied Physics;2022-08-18

4. Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator;Journal of Micromechanics and Microengineering;2022-08-12

5. Flexible Parametric Speaker with Ultra-Thin PZT/Si MEMS Chips Integrated On Paper Substrate;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09

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