Development of a nail-deformation haptics device fabricated adopting ultra-thin PZT-MEMS technology

Abstract

Abstract We describe the fabrication and evaluation of a nail-deformation haptics actuator having a flexible haptics film. The novelty of the developed actuator is the generation of a vibration that directly deforms the nail and finger pad. The flexible piezo-MEMS film is fabricated adopting ultra-thin lead-zirconate-titanate microelectromechanical system (MEMS) and lamination technology. The flexible piezo-MEMS film has flexibility (thickness: 65 μm) and low weight (mass: 55 mg). The device can thus be attached on a nail without discomfort. A nail-deformation haptics actuator was fabricated by attaching this flexible piezo-MEMS film on an artificial nail. When applying a DC voltage of 40 V to the film, there was a strain of −36.5 × 10−6 in the cylindrical direction of the nail and −12.1 × 10−6 in the circumferential direction. Furthermore, applying an AC voltage (40 V pp, 20 V offset) at a frequency of 200–300 Hz, the finger pad deformed sufficiently to perceive vibration.