Investigation of the giant step bunching induced by the etching of 4H-SiC in Ar–H2mix gases
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/55/i=9/a=095501/pdf
Reference31 articles.
1. Relation between Defects on 4H-SiC Epitaxial Surface and Gate Oxide Reliability
2. Simulation Studies on Giant Step Bunching Accompanying Trapezoid-Shape Defects in 4H-SiC Epitaxial Layer
3. Physics of Crystal Growth
4. Investigation of giant step bunching in 4H-SiC homoepitaxial growth: Proposal of cluster effect model
5. Spontaneous ordering of nanostructures on crystal surfaces
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Hydrogen Etching Process of 4H-SiC (0001) in Limited Regions;Solid State Phenomena;2024-08-22
2. Image analysis development for optimization of 4H–SiC trench recovery treatment by combination of gas etching and sacrificial oxidation approaches;Materials Science in Semiconductor Processing;2024-05
3. Step unbunching phenomenon on 4H-SiC (0001) surface during hydrogen etching;Applied Physics Letters;2023-07-17
4. Toward the Reproducible Growth of Graphene on Wide SiC Steps: A Study of the Geometric Properties of 4H-SiC (0001) Substrates;Materials Science Forum;2022-05-31
5. Features and Prospects for Epitaxial Graphene on SiC;Handbook of Graphene;2019-06-17
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3