Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Thin‐Film Formation Techniques;Kirk‐Othmer Encyclopedia of Chemical Technology;2020-06-15
2. Thermal Evaporation and Deposition in Vacuum;The Foundations of Vacuum Coating Technology;2018
3. Plasmas and Plasma Enhanced CVD;The Foundations of Vacuum Coating Technology;2018
4. An improved ion assisted deposition technology for the 21st century;Surface and Coatings Technology;1995-03
5. Ion plating: optimum surface performance and material conservation;Thin Solid Films;1994-04