Ion plating: optimum surface performance and material conservation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference44 articles.
1. Deposition Technology for Films and Coatings: Development and Applications;Bunshah,1982
2. Ion Plating Technology, Development and Applications;Ahmed,1987
3. Sputtering systems with magnetically enhanced ionization for ion plating of TiN films
4. Ion‐assisting magnetron sources: Principles and uses
5. Structure Modification by Ion Bombardment during Deposition
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