An improved ion assisted deposition technology for the 21st century

Author:

Ahmed N.A.G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference36 articles.

1. Deposition Technology for Films and Coatings — Development and Applications;Bunshah,1982

2. Ion Plating Technology, Development and Applications;Ahmed,1987

3. Simple parallel plate energy analyser for measuring the energy distribution of metal vapours in a discharge

4. Proc 4th Int. Colloq. on Plasma and Sputtering, Nice;Mattox,1982

5. Proc 5th Int. Conf. on Ion Sources and Ion Assisted Techniques, Kyoto University, 1–5 June 1981;Takagi,1981

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