Evaluation of Piezoelectric Ta2O5Thin Films Deposited on Sapphire Substrates
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference29 articles.
1. Deposition of Highly Oriented Ta2O5Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering
2. Properties of LiNbO3Thin Film Deposited by Chemical Vapor Deposition and Frequency Characteristics of Film Bulk Acoustic Wave Resonator
3. 5.4 GHz Lamb Wave Resonator on LiNbO3Thin Crystal Plate and Its Application
4. Study of Relationship between Layer Profile of SiO2and Characteristics of Surface Acoustic Wave Devices in SiO2/Al/LiTaO3System
5. Zero Temperature Coefficient of Frequency Surface Acoustic Wave Resonator for Narrow-Duplex-Gap Application on SiO2/Al/LiNbO3Structure
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1. Evaluation of bulk and surface acoustic waves propagation properties of (K,Na)NbO3 films deposited by hydrothermal synthesis or RF magnetron sputtering methods;Japanese Journal of Applied Physics;2022-06-21
2. Deposition and evaluation of Ta2O5 piezoelectric thin film on Pt crystal film;Japanese Journal of Applied Physics;2022-06-10
3. Synthesis of δ-Ta2O5 heteroepitaxial films on YVO4 (100) substrates;Materials Science in Semiconductor Processing;2021-11
4. Evaluation of piezoelectric Ta2O5thin films deposited on SrTiO3substrates;Japanese Journal of Applied Physics;2017-06-23
5. Love-type surface acoustic wave onY–XLiTaO3with amorphous Ta2O5thin film;Japanese Journal of Applied Physics;2015-06-03
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