Synthesis of δ-Ta2O5 heteroepitaxial films on YVO4 (100) substrates

Author:

Le Yong,Ma Xiaochen,Wang Di,Xiao Hongdi,Luan Caina,Ma JinORCID

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference51 articles.

1. Energy-band alignments at ZnO/Ga2O3 and Ta2O5/Ga2O3 heterointerfaces by X-ray photoelectron spectroscopy and electron affinity rule;Liu;J. Appl. Phys.,2019

2. Influences of annealing temperature on amorphous Ta2O5 thin films anti-reflective performance of;Sertel;Ceram. Int.,2019

3. Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications;Chaneliere;Mater. Sci. Eng. R Rep.,1998

4. High performance ZnO-thin-film transistor with Ta2O5 dielectrics fabricated at room temperature;Zhang;Appl. Phys. Lett.,2009

5. Low-voltage IGZO TFTs using solution-deposited OTS-modified Ta2O5 dielectric;Mohammadian;IEEE Trans. Electron. Dev.,2020

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