Evaluation of piezoelectric Ta2O5thin films deposited on SrTiO3substrates
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/56/i=7S1/a=07JD12/pdf
Reference31 articles.
1. Ultra-wideband and high frequency resonators using shear horizontal type plate wave in LiNbO3thin plate
2. Loss reduction of longitudinal-type leaky surface acoustic wave by loading with high-velocity thin film
3. Terahertz acoustic wave on piezoelectric semiconductor film via large-scale molecular dynamics simulation
4. Love-type surface acoustic wave onY–XLiTaO3with amorphous Ta2O5thin film
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1. Deposition and Evaluation of Highly Crystallized Ta2O5 Piezoelectric Thin Film on Pt Crystal Film;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10
2. Deposition and evaluation of Ta2O5 piezoelectric thin film on Pt crystal film;Japanese Journal of Applied Physics;2022-06-10
3. Synthesis and characterization of single-crystalline δ-Ta2O5 epitaxial films on Y-stabilized ZrO2 (111) substrates;Ceramics International;2021-02
4. Analysis of leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to similar-material substrates;Japanese Journal of Applied Physics;2020-03-11
5. Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate;Japanese Journal of Applied Physics;2019-07-01
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