Deposition and Evaluation of Highly Crystallized Ta<sub>2</sub>O<sub>5</sub> Piezoelectric Thin Film on Pt Crystal Film-Reference-Cited by-同舟云学术

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Deposition and Evaluation of Highly Crystallized Ta₂O₅ Piezoelectric Thin Film on Pt Crystal Film

Published:2022-10-10 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Ultrasonics Symposium (IUS)
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Author:

Matsuura Keisuke¹,Suzuki Masashi²,Kakio Shoji²,Kodera Masanori³,Funakubo Hiroshi³

Affiliation:

1. Integrated Graduate School of Medicine, Engineering, and Agricultural Sciences, University of Yamanashi,Yamanashi,Japan

2. University of Yamanashi,Graduate Faculty of Interdisciplinary Research,Yamanashi,Japan

3. School of Materials and Chemical Technology, Tokyo Institute of Technology,Yokohama,Japan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9957114/9957143/09957543.pdf?arnumber=9957543

Reference4 articles.

1. Evaluation of piezoelectric Ta2O5 thin films deposited on SrTiO3 substrates;sugaya;Jpn J Appl Phys,2017

2. Deposition and evaluation of Ta₂O₅ piezoelectric thin film on Pt crystal film

3. New piezoelectric Ta2O5thin films

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