Deposition of Highly Oriented Ta2O5Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering-Reference-Cited by-同舟云学术

Deposition of Highly Oriented Ta2O5Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering

Published:2011-07-20 Issue:7 Volume:50 Page:07HD09
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kakio Shoji,Tsuchiya Akinori,Nakagawa Yasuhiko

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference16 articles.

1. Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators

2. Growth ofc-Axis-Oriented LiNbO3Films on ZnO/SiO2/Si Substrate by Pulsed Laser Deposition for Surface Acoustic Wave Applications

3. Growth of <1\bar100> Epitaxial ZnO Film onY-Plane LiNbO3Substrate

4. High-Frequency Surface Acoustic Wave Resonator Filter Composed of ZnO/High-Density Electrode/Quartz Structure

5. High-Frequency Lamb Wave Device Composed of LiNbO3Thin Film

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