High-Frequency Surface Acoustic Wave Resonator Filter Composed of ZnO/High-Density Electrode/Quartz Structure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference11 articles.
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3. Deposition of Highly Oriented Ta2O5Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering;Japanese Journal of Applied Physics;2011-07-20
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