Plan-View and Cross-Sectional Photoluminescence Imaging Analyses of Threading Dislocations in 4H-SiC Epilayers
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference16 articles.
1. Nondestructive characterization of dislocations and micropipes in high-resistivity 6H–SiC wafers by deep-level photoluminescence mapping
2. Whole-Wafer Mapping of Dislocations in 4H-SiC Epitaxy
3. Differences in emission spectra of Si- and C-core partial dislocations
4. Differences in Emission Spectra of Dislocations in 4H-SiC Epitaxial Layers
5. Nondestructive Visualization of Individual Dislocations in 4H-SiC Epilayers by Micro Photoluminescence Mapping
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1. 3D structure of threading screw dislocation at a deep location in 4H-SiC using 3D micro-X-ray topography;Japanese Journal of Applied Physics;2024-01-04
2. Effect of basal plane dislocation structures on single Shockley-type stacking fault expansion rate in 4H-SiC;Japanese Journal of Applied Physics;2024-01-04
3. Partial dislocation structures at expansion terminating areas of bar-shaped single Shockley-type stacking faults and basal plane dislocations at the origin in 4H-SiC;Japanese Journal of Applied Physics;2022-11-24
4. Electronic and Optical Properties of Threading Dislocations in n-Type 4H-SiC;ACS Applied Electronic Materials;2022-04-12
5. The inclination of threading dislocation in chemical vapor deposition-grown single-crystal diamond analyzed by synchrotron white beam X-ray topography;Journal of the Korean Physical Society;2022-01
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