Separation of Thin GaN from Sapphire by Laser Lift-Off Technique
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference19 articles.
1. Optical patterning of GaN films
2. Pulsed Excimer Laser Processing of AlN/GaN Thin Films
3. Optical Process for Liftoff of Group III-Nitride Films
4. Laser-Processing for Patterned and Free-Standing Nitride Films
5. Damage-free separation of GaN thin films from sapphire substrates
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1. Laser Lift‐Off Technologies for Ultra‐Thin Emerging Electronics: Mechanisms, Applications, and Progress;Advanced Materials Technologies;2022-11-13
2. GaN-Based Lateral and Vertical Devices;Springer Handbook of Semiconductor Devices;2022-11-11
3. Low‐Energy UV Ultrafast Laser Controlled Lift‐Off for High‐Quality Flexible GaN‐Based Device;Advanced Functional Materials;2022-01-15
4. Long-Range Orbital Hybridization in Remote Epitaxy: The Nucleation Mechanism of GaN on Different Substrates via Single-Layer Graphene;ACS Applied Materials & Interfaces;2022-01-03
5. Spalling‐Induced Liftoff and Transfer of Electronic Films Using a van der Waals Release Layer;Small;2021-09-20
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