Self-aligned Si MESFETs fabricated in thin silicon-on-insulator films

Author:

Vu D.P.,Sono A.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Reference10 articles.

1. Haond, M., Dutartre, D., and Bensahel, D.: ‘Light beam induced recrystallisation of SOI films’, Nguyen, V.T., Cullis, A.G., Energy beam-solid interactions and transient thermal processing 1985, (Les Editions de Physique p. 417–426

2. Electrical Characterization of Beam—Recrystallized Soi Structures Using a Depletion Mode Transistor

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