Author:
Mahmood F,Raman V K,McMahon R A,Ahmed H,Jeynes C,Sarkar D
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. Rapid electron beam annealing of tantalum films on silicon;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1990-07