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Dry etching of thin-film InN, AlN and GaN

  • Published:1993-02-01 Issue:2 Volume:8 Page:310-312
  • ISSN:0268-1242
  • Container-title:Semiconductor Science and Technology
  • language:
  • Short-container-title:Semicond. Sci. Technol.

Author:

Pearton S J,Abernathy C R,Ren F,Lothian J R,Wisk P W,Katz A,Constantine C

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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