Author:
Bertagna Valérie,Rouelle François,Chemla Marius
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
7 articles.
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1. Methods for Assessing Surface Cleanliness;Developments in Surface Contamination and Cleaning, Volume 12;2019
2. References;Developments in Surface Contamination and Cleaning, Volume 12;2019
3. Metallic Contaminants on Surfaces and Their Impact;Developments in Surface Contamination and Cleaning: Types of Contamination and Contamination Resources;2017
4. Methods for Monitoring and Measuring Cleanliness of Surfaces;Developments in Surface Contamination and Cleaning;2012
5. Corrosion Behavior of Copper Thin Films in Organic HF-Containing Cleaning Solution for Semiconductor Applications;Journal of The Electrochemical Society;2010