Author:
Monk David J.,Soane David S.,Howe Roger T.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference114 articles.
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4. Microfabricated structures for theinsitumeasurement of residual stress, Young’s modulus, and ultimate strain of thin films
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