Total Room Temperature Wet Cleaning for Si Substrate Surface-Reference-Cited by-同舟云学术

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Total Room Temperature Wet Cleaning for Si Substrate Surface

Published:1996-09-01 Issue:9 Volume:143 Page:2957-2964
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Ohmi Tadahiro¹

Affiliation:

1. Department of Electronics, Faculty of Engineering, Tohoku University, Sendai 980, Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.1837133/pdf

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