Metallic Contaminants on Surfaces and Their Impact-Reference-Cited by-同舟云学术

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Metallic Contaminants on Surfaces and Their Impact

Published:2017 Issue: Volume: Page:1-54
ISSN:
Container-title:Developments in Surface Contamination and Cleaning: Types of Contamination and Contamination Resources
language:
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Author:

Kohli Rajiv

Publisher

Elsevier

Reference298 articles.

1. Handbook of Semiconductor Silicon Technology;O’Mara,1990

2. Ultraclean Surface Processing of Silicon Wafers. Secrets of VLSI Manufacturing,1995

3. Influence of Metallic Contamination on Dielectric Degradation of MOS Structures;Takiyama,1995

4. Metallic Contamination Assessment of Silicon Wafers;Joly;Microelectron. Eng.,1998

5. Influence of O2and H2O2 on the Metallic Contamination Process of Silicon Wafers in Dilute HF Solutions;Bertagna;Semicond. Sci. Technol.,1998

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1. Surface Contaminants and Surface Cleanliness Levels;Surfactants in Precision Cleaning;2022

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