Abstract
Abstract
Formation of singly and doubly charged Ar
q+ and Ti
q+ (q = 1,2) and of molecular Ar
2
+
, ArTi+, and Ti
2
+
ions in a direct current magnetron sputtering discharge with a Ti cathode and argon as working gas was investigated with the help of energy-resolved mass spectrometry. Measured ion energy distributions consist of low-energy and high-energy components resembling different formation processes. Intensities of Ar
2
+
and ArTi+ dimer ions strongly increase with increasing gas pressure. Addition of oxygen gas leads to the formation of positively charged O+,
O
2
+
, and TiO+ and of negatively charged O− and
O
2
−
ions.
Funder
Czech Ministry of Education, Youth and Sports
Grantová Agentura České Republiky
Subject
General Physics and Astronomy
Cited by
11 articles.
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