A computer simulation for mask-shape effect in the fabrication of an aspheric micro lens array by using a dragging process with excimer laser
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Micro-Optics
2. Production of novel 3D microstructures using excimer laser mask projection techniques
3. Laser microprojection for micromechanical device fabrication
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