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A study on the fabrication of rounded patterns by spin coating of photoresist on silicon substrate with microstructures

  • Published:2011-09-22 Issue:3 Volume:52 Page:499-506
  • ISSN:0032-3888
  • Container-title:Polymer Engineering & Science
  • language:en
  • Short-container-title:Polym Eng Sci

Author:

Yoon Jae Sung,Yoo Yeong-Eun,Choi Doo-Sun

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Application of a CFD Simulation on Spin Coating Process;2024 2nd International Symposium of Electronics Design Automation (ISEDA);2024-05-10

2. Metal Micro-forming of AA5052 Using High-durable Glassy Carbon Mold for Efficient Boiling Heat Transfer;International Journal of Precision Engineering and Manufacturing-Green Technology;2022-05-23

3. Geometry modulation of microlens array using spin coating and evaporation processes of photoresist mixture;International Journal of Precision Engineering and Manufacturing-Green Technology;2015-07

4. A study on the fabrication of microlens array based on the volume shrinkage of the photoresist solution during evaporation;Optics Communications;2014-12

5. Semitransparent, thin metal grid-based hybrid electrodes for polymer solar cells;Materials Science in Semiconductor Processing;2014-07
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