New shapes in (100) Si using KOH and EDP etches
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. A Water-Amine-Complexing Agent System for Etching Silicon
2. Anisotropic Etching of Silicon
3. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
4. Anisotropic etching of silicon
5. Compensation structures for convex corner micromachining in silicon
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