Author:
Serre Christophe,Pérez-Rodríguez Alejandro,Morante Joan Ramón,Esteve Jaume,Acero María-Cruz,Kögler Reinhard,Skorupa Wolfgang
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
10 articles.
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1. SiC Materials and Processing Technology;Silicon Carbide Microsystems for Harsh Environments;2011
2. Characterization of Si1-xCx:H thin films deposited by PECVD for SiCOI heterojuntion fabrication;Journal of the Brazilian Chemical Society;2006-10
3. DESIGN, PERFORMANCE AND APPLICATIONS OF SIC MEMS;Silicon Carbide Microelectromechanical Systems for Harsh Environments;2006-06
4. DEPOSITION TECHNIQUES FOR SIC MEMS;Silicon Carbide Microelectromechanical Systems for Harsh Environments;2006-06
5. Nano-crystalline Si1−xCx:H thin films deposited by PECVD for SiC-on-insulator application;Journal of Non-Crystalline Solids;2004-06