Calculation of electrostatic forces and torques in MEMS using path-independent integrals-Reference-Cited by-同舟云学术

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Calculation of electrostatic forces and torques in MEMS using path-independent integrals

Published:2000-08-10 Issue:3 Volume:10 Page:477-482
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Hui C-Y,Yeh J-L A,Tien N C

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. IC-processed electrostatic micromotors

2. Silicon as a mechanical material

3. Electrostatic-comb drive of lateral polysilicon resonators

4. Capillary electrophoresis and sample injection systems integrated on a planar glass chip

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Lie group analysis of non-linear dynamic of micro structures under electrostatic field;Journal of Computational Methods in Sciences and Engineering;2015-08-03

2. Numerical model for the calculation of the electrostatic force in non-parallel electrodes for MEMS applications;Journal of Electrostatics;2015-08

3. A Study of the Effect of the Fringe Fields on the Electrostatic Force in Vertical Comb Drives;Sensors;2014-10-27

4. Design of an electrostatic rotary comb actuator;Journal of Micro/Nanolithography, MEMS, and MOEMS;2006-04-01

5. Large rotation actuated by in-plane rotary comb-drives with serpentine spring suspension;Journal of Micromechanics and Microengineering;2004-10-30

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