Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials
Reference46 articles.
1. An efficient numerical technique for electrochemical simulation of complicated microelectromechanical structures;Aluru;Sensors Actuators A Phys.,1997
2. The resonant gate transistor;Nathanson;IEEE Trans. Electron Devices,1967
3. Miniaturization of tuning forks;Newell;Smithsonian/NASA Phys. Query Form Sci.,1968
4. Dynamic pull-in phenomenon in MEMS resonators;Nayfeh;J. Nonlinear Dyn.,2007
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