A Study of the Effect of the Fringe Fields on the Electrostatic Force in Vertical Comb Drives
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/14/11/20149/pdf
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3. Vertical comb array microactuators;Selvakumar;J. MEMS,2003
4. Large-displacement vertical microlens scanner with low driving voltage;Kwon;Photonics Technol. Lett.,2002
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