Fabrication of a polymer-based torsional vertical comb drive using a double-side partial exposure method
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Optimal shape design of an electrostatic comb drive in microelectromechanical systems
2. Design, fabrication, and operation of submicron gap comb-drive microactuators
3. Microelectromechanical filters for signal processing
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