Challenges in fabrication of high aspect ratio electrostatic comb-drive microactuator using one-step X-ray lithography-Reference-Cited by-同舟云学术

Challenges in fabrication of high aspect ratio electrostatic comb-drive microactuator using one-step X-ray lithography

Published:2020-11 Issue:2 Volume:9 Page:173-180
ISSN:2509-7989
Container-title:ISSS Journal of Micro and Smart Systems
language:en
Short-container-title:ISSS J Micro Smart Syst

Author:

Shukla Rahul^ORCID,Kannojia Harindra Kumar,Mukherjee C.,Sankar P. Ram,Thakur B. S.,Sinha A. K.,Pandey Dhananjai

Publisher

Springer Science and Business Media LLC

Subject

General Medicine

Link

http://link.springer.com/content/pdf/10.1007/s41683-020-00064-z.pdf

Reference30 articles.

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5. Christenson TR, Guckel H (1995) Deep X-ray lithography for micromechanics. In: Proceedings of SPIE, pp 134–145. https://doi.org/10.1117/12.221271

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