Publisher
Springer Science and Business Media LLC
Subject
Applied Mathematics,Computational Mathematics
Reference50 articles.
1. Ali IA (2012) Modeling and simulation of MEMS components: challenges and possible solutions. Micromachining techniques for fabrication o micro and nano structures. Springer Nature, Singapore
2. Angiulli G, Jannelli A, Morabito FC, Versaci M (2018) Recondtruting the membrane detection of a 1$$D$$ electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification. Comput Appl Math 37:4484–4498. https://doi.org/10.1007/s40314-017-0564-4
3. Batra RC, Porfiri M, Spinello D (2006) Electromechanical model of electrically actuated narrow microbeams. J Microelectromech Syst 15(5):1175–1189
4. Batra RC, Porfiri M, Spinello D (2006) Micro Nano Lett 1:2
5. Batra RC, Porfiri M, Spinello D (2007) Review of modeling electrostatically actuated microelectromechanical systems. Smart Mater Struct 16:6
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献