Improving capacitance/damping ratio in a capacitive MEMS transducer
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/24/i=1/a=015008/pdf
Reference26 articles.
1. Micromachined inertial sensors
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