Author:
Brito N.,Alves F.S.,Cabral J.,Gaspar J.,Monteiro J.,Rocha L.A.
Reference4 articles.
1. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips, Sensors, Basel;Deng;Switzerland,2014
2. N. Dumas, F. Azaïs, F. Mailly, A. Richardson, and P. Nouet, A novel method for test and calibration of capacitive accelerometers with a fully electrical setup, DDECS 2008, 11th IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, 2008, pp. 1-6.
3. Fully electrical test procedure for inertial MEMS characterization at wafer-level, 9th Conference on Ph.D.;Sisto;Research in Microelectronics and Electronics (PRIME),2013
4. Improving capacitance/damping ratio in a capacitive MEMS transducer;Dias;J. Micromech. Microeng,2014
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