High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation-Reference-Cited by-同舟云学术

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High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation

Published:1997-03-01 Issue:1 Volume:7 Page:30-36
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Ericson Fredric,Greek Staffan,Söderkvist Jan,Schweitz Jan-Åke

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Influence of surface coatings on elasticity, residual stresses, and fracture properties of silicon microelements

2. A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

3. Comparison of techniques for measuring both compressive and tensile stress in thin films

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1. A Poisson–Voronoi-based finite element stress analysis of resonating polysilicon micromachines;Acta Mechanica;2023-11-14

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3. (111)Si thin layers detachment by stress-induced spallation;Surface Topography: Metrology and Properties;2019-01-28

4. Effect of Low-Energy Ion-Plasma Treatment on Residual Stresses in Thin Chromium Films;Technical Physics;2018-12

5. XeF2etching of epitaxial Nb2N for lift-off or micromachining of III-N materials and devices;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09

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