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Rapid deep micromachining of polytetrafluoroethylene by MeV ion bombardment in oxygen-rich atmospheres

  • Published:2005-02-03 Issue:4 Volume:15 Page:698-701
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Gomez-Morilla I,Sofield C J,Grime G W,Gwilliam R

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning;Journal of Applied Polymer Science;2022-03-30

2. Morphological changes of poly(tetrafluoroethylene) surface due to low current density proton irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-06

3. Application of proton beam writing for the direct etching of polytetrafluoroethylene for polydimethylsiloxane replica molding;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-11

4. Correlation of chemical composition and electrical properties of rf sputtered alumina films;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2009-03

5. Proton beam writing;Materials Today;2007-06
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