The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning

Author:

Vila Bauer Deiverti12,Debastiani Rafaela34ORCID,Telles de Souza Claudia12,Amaral Livio12,Ferraz Dias Johnny12

Affiliation:

1. Ion Implantation Laboratory, Institute of Physics Federal University of Rio Grande do Sul Porto Alegre Rio Grande do Sul Brazil

2. Graduate Program on Materials Science Federal University of Rio Grande do Sul Porto Alegre Rio Grande do Sul Brazil

3. Institute of Nanotechnology, Karlsruhe Institute of Technology Hermann‐von‐Helmholtz‐Platz 1 Eggenstein‐Leopoldshafen Germany

4. 3DMM2O‐Cluster of Excellence (EXC‐2082/1‐390761711) Karlsruhe Institute of Technology (KIT) Karlsruhe Germany

Funder

Conselho Nacional de Desenvolvimento Científico e Tecnológico

Coordenação de Aperfeiçoamento de Pessoal de Nível Superior

Deutsche Forschungsgemeinschaft

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Surfaces, Coatings and Films,General Chemistry

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Proton Beam Writing Fabrication of Micro-Patterns in Dielectric Films for Improving Output Voltage Triboelectric Nanogenerators;2023 International Symposium on Electrical Insulating Materials (ISEIM);2023-09-24

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