Laser-induced activation of Mg-doped GaN: quantitative characterization and analysis

Author:

Nardo AORCID,de Santi C,Carraro C,Sgarbossa FORCID,Buffolo M,Diehle P,Gierth S,Altmann F,Hahn H,Fahle D,Heuken M,Fouchier M,Gasparotto A,Napolitani EORCID,Meneghesso GORCID,Zanoni E,Meneghini M

Abstract

Abstract We investigate the effectiveness of laser-induced treatment as compared to rapid-thermal annealing (RTA) for the activation of p-type dopant in Mg-doped GaN layers. The study is based on a wide set of analytical techniques, including resistivity measurements, atomic force microscopy (AFM), scanning emission microscopy, dynamic secondary ion mass spectroscopy (SIMS), time-of-flight (TOF) SIMS and energy dispersive x-ray (EDX) spectroscopy in combination with scanning transmission electron microscopy (STEM). Samples are treated at different energy densities and in different atmospheres, to provide a comprehensive overview of the topic. The analysis is carried out on GaN-on-Si samples, to demonstrate the effectiveness of the treatment even in presence of high threading dislocation densities. The original results presented in this paper indicate that: (a) laser treatment is an effective process for activating the p-type dopant in Mg-doped GaN layers; even at low irradiation energy densities (400 mJ cm−2) the laser treatment can effectively activate the Mg doping, with the best resistivity results obtained (around 1.5 Ωcm) comparable with those obtained by optimized RTA; (b) resistivity varies with temperature with activation energy E a = 0.14 eV, which is compatible with the MgGa acceptor in GaN; (c) TOF-SIMS, AFM, EDX-STEM analysis indicates that the laser treatment does not modify the concentration profile of magnesium and surface roughness for low and moderate laser energy densities; changes are detected only for energy densities above 600 mJ cm−2, for which a significant degradation of the surface is revealed. The experimental evidence collected within this paper provide an accurate assessment of the process conditions for effective laser activation of Mg-doped GaN, thus allowing the fine-tuning required for selective activation and for industrial applications.

Funder

University of Padova

European Union

Ministry of Education

ECSEL

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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