Effect of space charge on the negative oxygen flux during reactive sputtering-Reference-Cited by-同舟云学术

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Effect of space charge on the negative oxygen flux during reactive sputtering

Published:2017-02-14 Issue:11 Volume:50 Page:115201
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Moens F,Kalvas T,Van Steenberge S,Depla D

Funder

Fonds Wetenschappelijk Onderzoek

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/50/i=11/a=115201/pdf

Reference18 articles.

1. Energetic condensation: Processes, properties, and products

2. Microstructural evolution during film growth

3. Momentum transfer driven textural changes of CeO2 thin films

4. Structure formation upon reactive direct current magnetron sputteringof transition metal oxide films

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The measurement and impact of negative oxygen ions during reactive sputter deposition;Critical Reviews in Solid State and Materials Sciences;2023-09-21

2. Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe;Vacuum;2021-12

3. Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition;Journal of Physics D: Applied Physics;2021-02-01

4. Energy flux measurements during magnetron sputter deposition processes;Surface and Coatings Technology;2019-11

5. Impact of positive ion energy on carbon-surface production of negative ions in deuterium plasmas;Journal of Physics D: Applied Physics;2019-08-12

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