Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition-Reference-Cited by-同舟云学术

Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition

Published:2021-02-01 Issue:15 Volume:54 Page:155203
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Tonneau R^ORCID,Moskovkin P,Muller J,Melzig T,Haye E^ORCID,Konstantinidis S,Pflug A,Lucas S^ORCID

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1088/1361-6463/abd72a/pdf

Reference57 articles.

1. Characterization of an Ar/O2 magnetron plasma by a multi-species Monte Carlo model;Bultinck;Plasma Sources Sci. Technol.,2011

2. Particle-in-cell/Monte Carlo collisions treatment of an Ar/O2 magnetron discharge used for the reactive sputter deposition of TiOx films;Bultinck;New J. Phys.,2009

3. Towards a more complete model for reactive magnetron sputtering;Depla;J. Phys. D: Appl. Phys.,2007

4. Photocatalytic titanium dioxide thin films prepared by reactive pulse magnetron sputtering at low temperature;Glöß;Surf. Coat. Technol.,2005

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