Characterization of an Ar/O2magnetron plasma by a multi-species Monte Carlo model
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference70 articles.
1. Properties of SiO2 and Al2O3 films for electrical insulation applications deposited by reactive pulse magnetron sputtering
2. Investigation into the properties of titanium based films deposited using pulsed magnetron sputtering
3. Characterisation of aluminium oxide thin films deposited on polycarbonate substrates by reactive magnetron sputtering
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5. Scanning electron microscopy study of the growth mechanism of biaxially aligned magnesium oxide layers grown by unbalanced magnetron sputtering
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